发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device that is suitable for miniaturization is provided. A semiconductor device including a first element, a first insulator over the first element, a first barrier film over the first insulator, a first conductor over the first barrier film, a second barrier film over the first conductor, a second insulator over the second barrier film, and a semiconductor over the second insulator is provided. The first conductor is surrounded by the first barrier film and the second barrier film.
申请公布号 SG11201604650S(A) 申请公布日期 2016.07.28
申请号 SG11201604650S 申请日期 2014.12.15
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 MIYAIRI, HIDEKAZU;SASAGAWA, SHINYA
分类号 H01L29/786;G02F1/1368;H01L21/28;H01L21/336;H01L21/8242;H01L21/8247;H01L27/105;H01L27/108;H01L27/115;H01L29/417;H01L29/423;H01L29/49;H01L29/788;H01L29/792;H01L51/50 主分类号 H01L29/786
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