| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device and defect inspection method that can implement a correct classification corresponding to an actual shape of the defect even when detecting defects using a rotation optical system.SOLUTION: A defect inspection device includes: an imaging unit that images an inspection object by a line sensor to be arranged at a prescribed rotation angle to generate image data; a first defect detection unit that detects a first center position and first amount of characteristic of a first defect detected by defect detection processing; an image extraction unit that extracts a first defect inclusion area image from the image data generated by the imaging unit; an image correction unit that corrects the first defect inclusion area image extracted by the image extraction unit on the basis of the prescribed rotation angle, and generates a second defect inclusion area image; a second defect detection unit that detects a second center position and second amount of characteristic of a second defect detected by the detection processing; and a second defect classification unit that classifies the defect on the basis of the second amount of characteristic.SELECTED DRAWING: Figure 1 |
