| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify a structure, and to reliably supply an abrasive liquid or a dressing liquid without loss by fixing an abrasive liquid supply nozzle to a top ring head in a polishing device composed of a top ring and a turntable. SOLUTION: An abrasive liquid supply nozzle 10 is fixed to the outside surface of a top ring head 40. The abrasive liquid supply nozzle 10 is composed of thin piping, and is arranged so that a nozzle port 11 is positioned on the upper side of a rotary turntable 60 in the outer peripheral vicinity of a top ring 45. A fixing means 15 is composed of an elastic body by arranging a large number of recessed sandwiching parts in lateral one row, and can change a position of the nozzle port 11 by engaging the abrasive liquid supply nozzle 10 with either sandwiching part. A spiral tube 19 is arranged in the upper part to follow it when the top ring head 40 turns.</p> |
