| 摘要 |
PROBLEM TO BE SOLVED: To enlarge a territory in which the carrying devices are accessible to each other by shifting the center among respective pins in the direction to cross at right angles to a straight line connecting together both carrying devices, in a device delivering and receiving a substrate between two carrying devices on both sides and holding the substrate with at least three supporting pins. SOLUTION: Three supporting pins 29 are standingly provided on the base of a delivery base 26, the tweezers 27 of one side carrying device loads a wafer W on the supporting pins 29, and the tweezers 30 of the other side carrying device receives the wafer W on the supporting pins 29. Hereat, the one side tweezers 27 delivers the wafer W between it and the supporting pins 29, so that the center C1 of the wafer W delivered and received between it and the supporting pins 29 is shifted by a fixed distance in the direction D2 to cross at right angles to the delivery direction D1 of the wafer W. Hereby the accessible territory 3 of the other side tweezers 30 is enlarged without receiving interference of the one side tweezers 27 and the supporting pins 29. |
