发明名称 Stocker apparatus with increased input/output capacity
摘要 Within both a stocker apparatus and a method for operating the stocker apparatus there is employed: (1) a minimum of six input/output ports; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of six input/output ports and a storage location within the array of storage locations. Within the stocker apparatus and the method, the minimum of six input/output ports provides for more efficient operation of the stocker apparatus.
申请公布号 US2002094256(A1) 申请公布日期 2002.07.18
申请号 US20010761296 申请日期 2001.01.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHANG YU-YEN;LIN KUO-CHEN
分类号 H01L21/677;(IPC1-7):B65H9/04;B65H9/06 主分类号 H01L21/677
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