发明名称 FILM-FORMING METHOD AND FILM-FORMING APPARATUS
摘要 <p>Disclosed is a method for forming a crystalline film mainly composed of PZT(111) on a foundation film mainly composed of an (111)-oriented noble metal. This film-forming method comprises a step for forming an oxide film having an interplanar spacing closer to that of the PZT(111) than that of the noble metal on the surface of the foundation film, and a step for forming the crystalline film on the surface of the oxide film by an MOCVD method.</p>
申请公布号 WO2008016044(A1) 申请公布日期 2008.02.07
申请号 WO2007JP64980 申请日期 2007.07.31
申请人 ULVAC, INC.;MASUDA, TAKESHI;KAJINUMA, MASAHIKO;NISHIOKA, YUTAKA;KIMURA, ISAO;KIKUCHI, SHIN;YAMADA, TAKAKAZU;SUU, KOUKOU 发明人 MASUDA, TAKESHI;KAJINUMA, MASAHIKO;NISHIOKA, YUTAKA;KIMURA, ISAO;KIKUCHI, SHIN;YAMADA, TAKAKAZU;SUU, KOUKOU
分类号 H01L21/316 主分类号 H01L21/316
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