Interchangeable magnet pack

摘要

A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the template. A yoke is connected with a second side of the template. The removable inserts are operable to customize or shape a magnetic field over a target. The yoke is operable to provide a return path for the magnetic field.

主权项

1. An apparatus, comprising:
a target positioned opposite a substrate; a template comprising a plurality of cells; a plurality of removable inserts disposed within the plurality of cells, wherein
the plurality of removable inserts comprises full cell length magnetic inserts, half cell length magnetic inserts, full cell length non-magnetic inserts, and half cell length non-magnetic inserts,one cell of the plurality of cells comprises a full cell length non-magnetic insert,another cell of the plurality of cells comprises one of the half cell length magnetic inserts and one of the half cell length non-magnetic inserts andthe plurality of removable inserts is configured to be rearranged and inserted into different cells of the plurality of cells to alter performance of a sputtering apparatus; a cover removably connected with a first side of the template configured to conceal the plurality of removable inserts, wherein the cover is configured to be positioned proximate to the target; and a yoke removably connected with a second side of the template, wherein the template, the cover, and the yoke secure the plurality of removable inserts.