SILICON CARBIDE STACK BOTTOM SEAL ARRANGEMENT

摘要

Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer shell, an insulation layer inwardly of the outer shell, a concentric inner shell inwardly of the outer shell, and a concentric liner that is positioned inwardly of the inner shell and that defines a reactor chamber. The inner shell and liner are sealed together at their bottoms by an O-ring seal arrangement to prevent gas in the reactor chamber from entering a space between the inner shell and the liner. A central inlet nozzle produces a vertical gas plume in the reactor chamber.

主权项

1. A silicon deposition reactor system comprising:
a vessel having a base, a top head, and a generally tubular outer shell that extends generally vertically between the base and the top head; a generally tubular inner shell located inwardly of the outer shell, the inner shell extending generally vertically and being supported by the vessel; a generally tubular liner located inwardly of the inner shell, the liner extending generally vertically and being supported by the inner shell, the liner having an inner surface that at least partially defines a chamber suitable to contain a plurality of silicon particles in a fluidized bed; at least one nozzle for injecting gas into the chamber; and at least one outlet for removing gas from the chamber.