Plasma Deposition Process with Removal of Substrate Tube

摘要

Disclosed are methods for manufacturing a precursor for a primary preform for optical fibers via an internal plasma deposition process. An exemplary method includes creating a first plasma reaction zone having first reaction conditions in the interior of a hollow substrate tube to deposit non-vitrified silica layers on the inner surface of the hollow substrate tube, and subsequently creating a second plasma reaction zone having second reaction conditions in the interior of the hollow substrate tube to deposit vitrified silica layers on the deposited, non-vitrified silica layers. Thereafter, the hollow substrate tube is removed from the deposited, vitrified silica layers to yield a deposited tube.

主权项

1. A method for manufacturing a precursor for a primary preform for optical fibers via an internal plasma deposition process, the method comprising the following steps:
i) providing a hollow substrate tube; ii) creating a first plasma reaction zone having first reaction conditions in the interior of the hollow substrate tube by means of electromagnetic radiation to deposit non-vitrified silica layers on the inner surface of the hollow substrate tube; iii) creating a second plasma reaction zone having second reaction conditions in the interior of the hollow substrate tube by means of electromagnetic radiation to deposit vitrified silica layers on the non-vitrified silica layers deposited in step ii); and iv) removing the hollow substrate tube from the vitrified silica layers deposited in step iii) to obtain a deposited tube.