INSPECTION DEVICE AND INSPECTION METHOD

摘要

An inspection device 80 for inspecting an object of inspection on the basis of light irradiated onto the object of inspection is provided with epi-illumination 104 for irradiating light onto the object of inspection, lateral illumination 102 for irradiating light onto the object of inspection, and an imaging device 96 for imaging the object of inspection on the basis of light reflected by the object of inspection during irradiation by at least one from among the epi-illumination and lateral illumination. The imaging device carries out at least two types of imaging from among total illumination imaging that is imaging of the object of inspection on the basis of light reflected by the object of inspection during irradiation from both the epi-illumination and lateral illumination, epi-illumination imaging that is imaging of the object of inspection on the basis of light reflected by the object of inspection during irradiation from the epi-illumination but not the lateral illumination, and lateral illumination imaging that is imaging of the object of inspection on the basis of light reflected by the object of inspection during irradiation from the lateral illumination but not the epi-illumination.