发明名称 Semiconductor device with an L-shaped/reversed L-shaped gate side-wall insulating film and method of manufacturing same
摘要 Provided is a semiconductor device, comprising a gate electrode formed on a semiconductor substrate, source/drain diffusion layers formed on both sides of the gate electrode, a gate electrode side-wall on the side of the source/drain diffusion layer and a gate side-wall insulating film covering a part of the upper surface of the semiconductor substrate in the vicinity of the gate electrode and having an L-shaped/reversed L-shaped cross-sectional shape, and a semiconductor layer extending over the gate side-wall insulating film covering a part of the upper surface of the semiconductor substrate in the vicinity of the gate electrode.
申请公布号 US2005167765(A1) 申请公布日期 2005.08.04
申请号 US20050090101 申请日期 2005.03.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HOKAZONO AKIRA
分类号 H01L21/28;H01L21/336;H01L21/76;H01L21/762;H01L21/8234;H01L29/417;H01L29/78;(IPC1-7):H01L31/032 主分类号 H01L21/28
代理机构 代理人
主权项
地址