发明名称 |
RF MEMS switch and fabrication method thereof |
摘要 |
Disclosed are an RF MEMS switch and a fabrication method thereof. According to an embodiment the RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate can be formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.
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申请公布号 |
US2007094864(A1) |
申请公布日期 |
2007.05.03 |
申请号 |
US20060640198 |
申请日期 |
2006.12.18 |
申请人 |
PARK JAE-YEONG;LEE HEE-CHUL |
发明人 |
PARK JAE-YEONG;LEE HEE-CHUL |
分类号 |
B81B7/02;H04R17/00;H01P1/12 |
主分类号 |
B81B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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