| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator wherein durability of a plasma generating nozzle can be enhanced. <P>SOLUTION: The plasma generator PU is equipped with a microwave generator 20 to generate a microwave, a waveguide 10 to propagate the microwave, and a plasma generating part 30 provided on the surface of the waveguide 10 which faces a work W. A plurality of plasma generating nozzles 31 which produces and discharges a gas made into plasma based on energy of the microwave by receiving it are arranged and mounted on the plasma generating part 30. The plasma generating nozzle 31 includes a center conductor 32 which is held by a seal member 35 and one end of which protrudes into the inside of the waveguide 10, and a nozzle body 33 disposed around and apart from the center conductor 32, and is structured so that the gas is supplied between the center conductor 32 and the nozzle body 33 through a seal member side passage 54 formed in the inside of the seal member 35 so as to cool the seal member 35. <P>COPYRIGHT: (C)2007,JPO&INPIT |
