| 摘要 |
A bipolar electrostatic chuck is provided to prevent a spark generation fundamentally between first and second electrodes by positioning the first and second electrodes respectively on an upper surface and a lower surface of a dielectric substrate. A bipolar electrostatic chuck comprises a body part(10) and a film part(20) which is provided on the body part. The film part comprises insulating layers(40), a first electrode(61), a second electrode(62) and a dielectric substrate(30) installed between the insulating layers wherein the first electrode has opposite polarity to the second electrode. The electrodes have a predetermined pattern so that the voltages having opposite polarities each other are added. The first and second electrodes are installed on an upper surface and a lower surface respectively to be insulated by the dielectric substrate.
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