,申请号JP19970026908-传众专利搜索

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发明名称
摘要
申请公布号	JP4044637(B2)	申请公布日期	2008.02.06
申请号	JP19970026908	申请日期	1997.02.10
申请人		发明人
分类号	C30B29/18;H01L21/316;C23C16/40;C23C16/50;H01L21/205	主分类号	C30B29/18
代理机构		代理人
主权项
地址

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