发明名称 Fin field effect transistor and method of forming the same
摘要 Provided are a fin field effect transistor (FinFET) with recess source/drain regions, and a method of forming the same. One example embodiment may provide a semiconductor device including a fin provided on a substrate and extending in a first direction, the fin including a stepped portion, and a gate electrode extending in a second direction crossing the first direction, and provided on a top surface and side surfaces of the stepped portion of the fin.
申请公布号 US2008048262(A1) 申请公布日期 2008.02.28
申请号 US20070892320 申请日期 2007.08.22
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 LEE DEOK-HYUNG;LEE SUN-GHIL;BUH GYEONG-HO;YOO JONG-RYEOL;CHOI SI-YOUNG;PARK TAI-SU
分类号 H01L27/12;H01L21/84 主分类号 H01L27/12
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