LASER BEAM FINE MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laser beam fine machining apparatus of which the machining efficiency can be enhanced by simultaneously machining a plurality of workpieces, and which can perform highly accurate machining without being conscious of the rotation center of a turntable.

SOLUTION: The laser beam fine machining apparatus is equipped with: a workpiece fixture which is formed of a flat plate having the thickness substantially identical to the thickness of a workpiece, and has a plurality of fitting holes which are through in the thickness direction and regulate the position of the fitted workpiece; and the turntable which sucks the workpiece fixture and the workpiece fitted to the fitting hole and rotates them. Each of the plurality of fitting holes is formed away from the rotation center of the workpiece fixture, and the height of a machining surface of the workpiece and of a non-suction surface of the workpiece fixture is substantially same.

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