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发明名称
摘要
申请公布号
JP4118696(B2)
申请公布日期
2008.07.16
申请号
JP20030021856
申请日期
2003.01.30
申请人
发明人
分类号
H01L21/8246;H01L21/762;H01L27/112
主分类号
H01L21/8246
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代理人
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地址
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