| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and device of a superconductive tape in an integrated process in which all of processes for manufacturing the superconductive tape can be conducted in a same environment, and a manufacturing cost and time are reduced, and a same depositing condition can be applied to a whole of the superconductive tape and a uniformity of the superconductive tape can be improved and performance is excellent, and vapor-deposition on a large area substrate by a drum can be made possible and a superconductive tape having vapor-deposition efficiency and a high quality can be obtained. SOLUTION: The manufacturing method of a superconductive tape in an integrated process includes a process in which a substrate which is wound over a drum is heat-treated inside a reaction chamber and components composing a buffer layer including a superconductive tape supplied from the depositing chamber, a superconductive layer, a contact resistance reducing layer, and a protective layer are continuously vapor-deposited on the substrate and heat-treated. COPYRIGHT: (C)2008,JPO&INPIT |
