发明名称 CHIP DEVICE FOR MONITORING AND REGULATING FLUID FLOW, AND METHODS OF MANUFACTURE THEREOF
摘要 A device for monitoring fluid media, and methods of manufacture thereof are disclosed. The monitoring device may be implemented as a single monolithic unit made from a certain type of material without a separate packaging, and having a base element comprising at least one fluid port and at least one cavity or fluid flow path fluidly coupled to the at least one fluid port for enabling fluid exchange of fluid media therewith. The device comprises at least one sensing element associated with the cavity or fluid flow path and configured and operable for measuring at least one property or condition of fluid media introduced therein to, and generate measurement data or signals indicative thereof. Electrical contacts disposed on the base element of the device, and electrically coupled to the at least one sensing element are used for establishing electrical connection with the at least one sensing element.
申请公布号 WO2015114635(A9) 申请公布日期 2016.08.11
申请号 WO2015IL50111 申请日期 2015.02.01
申请人 EZMEMS LTD. 发明人 SHMILOVICH, TSVI;MOLINAZZI, NICOLA
分类号 G01L9/00 主分类号 G01L9/00
代理机构 代理人
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