| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing object holding material having wear resistance, and a polishing object holding material which is recyclable by restoring a used polishing object holding material used for chemical mechanical polishing to a form before use. <P>SOLUTION: The polishing object holding material includes a fiber-reinforced resin layer and a thermosetting resin layer composed of a thermosetting resin composition on at least one face of the fiber-reinforced resin layer. The thermosetting resin layer is attained by a polishing object holding material characterized in that the material has a polishing rate of 35 μm/h or less in the following conditions, (A)-(F): (A) surface pressure: 700 gf/cm<SP POS="POST">2</SP>, (B) number of revolutions of a table: 40 rpm, (C) number of revolutions of a chuck: 40 rpm, (D) polishing liquid: colloidal silica with a particle size of 70 nm or more, pH 12, a solid content concentration of 5%, (E) polishing liquid flow rate: 150 ml/min, (F) polishing time: 60 min. <P>COPYRIGHT: (C)2013,JPO&INPIT |
