METHOD OF PRODUCING WAVEGUIDE DEVICE

摘要

This invention is directed to substantially eliminate or reduce discharge breakdown of optical waveguide patterns formed on a crystalline substrate having a pyroelectric effect, and to improve the yield at the time of production of optical waveguide devices. A method of providing an optical waveguide device comprises forming a plurality of parallel waveguide patterns (5) on a lithium niobate substrate (2), and cutting it into predetermined chips, wherein the patterns are formed in such a fashion that both end portions of the waveguide patterns (5), etc., are conductive with one another at positions deviated from an effective chip range. Further, dummy patterns (26), etc., are formed in the proximity of the waveguide patterns (25), etc.