| 摘要 |
<P>PROBLEM TO BE SOLVED: To derive out performance evaluation of a conditioner and a conditioning condition and enabling proper conditioning by establishing a method for evaluating the conditioner by which the surface state and a performance of a polishing pad to be conditioned can be predicted and by combining the same with a database constituted by accumulating the evaluating data of the conditioner. <P>SOLUTION: A cutting mark 3 is formed in a surface by rotating a grinding particle face of the conditioner 1 to be evaluated by one turn with the grinding particle face brought into contact with a surface of a resin plate 2, a cross-sectional profile of the surface where the cutting mark 3 is formed is measured, at least one of the roughness of the cutting mark, a height frequency distribution of the cutting mark, and a sum of widths of the cutting mark is obtained as evaluating articles of the conditioner based on the obtained cross-sectional profile. <P>COPYRIGHT: (C)2013,JPO&INPIT |
