发明名称 |
Production of an integrated circuit including electrical contact on SiC |
摘要 |
Production of an integrated circuit including an electrical contact on SiC is disclosed. One embodiment provides for production of an electrical contact on an SiC substrate, in which a conductive contact is produced on a boundary surface of the SiC substrate by irradiation and absorption of a laser pulse on an SiC substrate.
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申请公布号 |
US8450196(B2) |
申请公布日期 |
2013.05.28 |
申请号 |
US20070924093 |
申请日期 |
2007.10.25 |
申请人 |
RUPP ROLAND;GUTT THOMAS;TREU MICHAEL;INFINEON TECHNOLOGIES AUSTRIA AG |
发明人 |
RUPP ROLAND;GUTT THOMAS;TREU MICHAEL |
分类号 |
H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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