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发明名称
Method for polishing work using electrolytic reduced water
摘要
申请公布号
EP1785228(B1)
申请公布日期
2009.01.07
申请号
EP20060255776
申请日期
2006.11.10
申请人
FUJIKOSHI MACHINERY CORP.
发明人
SATO, UNKAI;ICHIKAWA, KOICHIRO;NISHIMOTO, YOSHINOBU;NAKAMURA, YOSHIO;HASEGAWA, TSUYOSHI;IIHAMA, MASUMI
分类号
B24B37/00;B24B55/02;B24B57/02;C09G1/00;H01L21/304
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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