Method of manufacturing mirror shells of a nested shells grazing incidence mirror

摘要

The present invention relates to a method of manufacturing mirror shells of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays. In the method a blank of a bulk material is provided and machined to form a mirror body of the shell. Mechanical structures are integrated and/or attached to the mirror body during and/or after the machining step. The mechanical structures are required for mounting and/or operating the mirror shells. After these steps the optical surface is formed on the mirror body by diamond turning. The proposed method allows the manufacturing of mirror shells of a nested shells grazing incidence mirror at low costs with high optical quality which may also be refurbished one or several times.

主权项

1. A method of manufacturing mirror shells of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays, the method at least comprising the steps of
providing and machining a blank of a bulk material to form a mirror body of the shell, wherein said mirror body is formed to have edges which are knife edge shaped integrating and/or attaching mechanical structures in and/or to the mirror body during and/or after said step of machining the blank, and forming an optical surface on the mirror body including said mechanical structures by diamond turning.