| 摘要 |
<p>PROBLEM TO BE SOLVED: To observe the cross-section of a foreign object by switching the secondary electronic sample surface image of a sample which is irradiated with an ion beam and the secondary electronic cross-section worked image of the side face of a designated foreign part obtained by groove-cutting the designated foreign part with an ion beam, and alternately and instantaneously displaying it in a method for observing a cross-section worked image for operating a groove-cutting working to a foreign part being the cause of a sample defect, and observing the side face. SOLUTION: An ion beam irradiation system and an electronic beam irradiation system are arranged, so that the irradiation axes can be arranged at an angle which is 90 deg. or less and mounted on the same sample chamber, so that the same point on a foreign object which is the cause of a sample defect can be scanned and irradiated with an ion beam and an electron beam. The foreign object is scanned with the ion beam, and sputter groove cutting working is operated by emitting a secondary electron or increasing strength or an acceleration voltage. A beam switcher 13 alternately switched between the ion beam irradiation system and the electronic beam irradiation system, and an image display device 19 displays the output of a detector 6 as the surface image of a sample 7 or the cross-section worked image of the side face of the foreign object obtained by operating the groove-cutting working, according to the switching operation of the beam switcher 13.</p> |
