| 摘要 |
PROBLEM TO BE SOLVED: To reduce a vibration produced on a wafer being transferred, due to an effect of static electricity. SOLUTION: A transferring arm has two protruded supporters, and the tip of the supporter is formed so that its thickness reduces as it goes to the extremity. A plurality of absorbing holes are located inside a sectoral area at regular spaces on the transferring arm surface for mounting the wafer, and the wafer is fixed to the transferring arm by the absorbing holes. Much static electricity is charged on the wafer, and the transferring arm is charged with the static electricity. Since a coating of a conductive fluoride graphite material is applied on the surface of the transferring arm, a discharge speed is improved in the transferring arm to the atmosphere. Therefore, the rise of surface potential of the transferring arm in a floating state can be exactly inhibited. Consequently, the vibration of the wafer can be reduced because the repulsion caused from the static electricity acting can be decreased between the transferring arm and the wafer. COPYRIGHT: (C)2007,JPO&INPIT |
