| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein a positioning mechanism with a complicated sequence and an operation sequence are required as devices to reduce a defective positioning operation, because a measured object is difficult to be moved so as to make a forcible positioning operation difficult, because of influences of a mass and static electricity of the measured object, in accompaniment to size-up of the measured object, and because the defective positioning operation thereby occurs frequently. SOLUTION: A mounted position of the measured object (sample) is measured by an alignment system based on a picked-up image, i.e. based on the camera image picked up without positioning physically the measured object such as a substrate, and observation positioning is correct based thereon. This instrument of the present invention is provided, for the purpose hereinbefore, with a fine motion shaft mechanism and a correction control means for position-correcting a head part of an imaging device. COPYRIGHT: (C)2007,JPO&INPIT
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