| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor which is free from an effect from an external environment affecting a self-resonance frequency and also free from a humidity. SOLUTION: The sensor comprises a vibrator 5 attaching with a weight 22 at an edge part of an arm 21 which can deform freely, a distortion detection element 23 mounting on a deformation part 21a of the arm 21 which is capable of the detection of the distortion, a mounting part 4 which mounts the vibrator 5, capable of a vibration, the mounting part 4 is mounted in a case 3, a filling material 6 which is made of a silicone material is filled around the mounting part 4 in the case 3. COPYRIGHT: (C)2007,JPO&INPIT
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