发明名称 PATTERN FORMATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a pattern formation method allowing the formation of on-demand patterns. SOLUTION: On a receiving part P, there is formed liquid-repellent parts 16a and 16b having the shape of surrounding the external frame of the wiring pattern to be formed by an ink-jet method. After that, the liquid-repellent parts 16a and 16b are transferred onto the pattern formation side So of a substrate S to form a liquid-repellent pattern on a substrate S. After that, liquid droplets are applied into the region that is surrounded by the liquid-repellent pattern that is transferred onto the substrate S by the ink-jet method, and a wiring pattern is formed. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008098552(A) 申请公布日期 2008.04.24
申请号 JP20060281139 申请日期 2006.10.16
申请人 SEIKO EPSON CORP 发明人 TOYODA NAOYUKI
分类号 H01L21/027 主分类号 H01L21/027
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