| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum washing machine which efficiently condenses steam generated in a waste liquid condensation chamber without enlarging the device.SOLUTION: A vacuum washing machine 100 includes: a steam chamber 200 which generates steam of a washing agent; a washing chamber 102 in which a workpiece W is washed under reduced pressure, the washing chamber 102 being connected with the steam chamber; a waste liquid condensation chamber 250 which stores a waste liquid generated when the workpiece is washed in the washing chamber; a condensation chamber heat exchanger 320 which is provided at the waste liquid condensation chamber and heats the waste liquid to generate the steam of the washing agent and condense the waste liquid; an on-off valve 260 which allows the waste liquid condensation chamber and the washing chamber to communicate with each other or interrupts communication therebetween; a dry chamber 152 which is connected with the washing chamber and is maintained in a decompressed state; a temperature maintaining device 154 which maintains the dry chamber at a temperature lower than the washing chamber; and an on-off valve 150 which allows the dry chamber and the washing chamber to communicate with each other or interrupts communication therebetween. |
