发明名称 BONDED SYSTEM AND A METHOD FOR ADHESIVELY BONDING A HYGROSCOPIC MATERIAL
摘要 A bonded system includes a reconstituted wafer including a hygroscopic material. A moisture barrier layer is arranged over a surface of the reconstituted wafer. An adhesive layer is arranged over a surface of the moisture barrier opposite the reconstituted wafer. A carrier is arranged over a surface of the adhesive layer opposite the moisture barrier. The adhesive layer adhesively bonds the reconstituted wafer and the carrier together.
申请公布号 US2016247739(A1) 申请公布日期 2016.08.25
申请号 US201615047098 申请日期 2016.02.18
申请人 Infineon Technologies AG 发明人 Von Waechter Claus;Altschaeffl Christian;Doepke Holger;Hoeckele Uwe;Muehlbauer Franz Xaver;Porwol Daniel;Schmidt Tobias;Schweiger Christian;Von Koblinski Carsten
分类号 H01L23/26;H01L23/00;H01L21/02;H01L23/29;H01L23/31 主分类号 H01L23/26
代理机构 代理人
主权项 1. A bonded system, comprising: a reconstituted wafer comprising a hygroscopic material; a moisture barrier arranged over a surface of the reconstituted wafer; an adhesive layer arranged over a surface of the moisture barrier opposite the reconstituted wafer; and a carrier arranged over a surface of the adhesive layer opposite the moisture barrier, wherein the adhesive layer adhesively bonds the reconstituted wafer and the carrier together.
地址 Neubiberg DE