Combined production method for separating a number of thin layers of solid material from a thick solid body

摘要

The invention relates to a method for producing layers of solid material. The production method comprises at least the following steps:;Providing a solid body (2) to be split into a number of layers of solid material (4), introducing or generating defects in the solid body (2) in order to determine a first detachment plane (8) along which a first layer of solid material (4) is separated from the solid body (2), providing a receiving layer (10) for holding the layer of solid material (4) on the solid body (2), applying heat to the receiving layer (10) in order to generate, in particular mechanically, stresses in the solid body (2), due to the stresses a crack propagating in the solid body (2) along the detachment plane (8), which crack separates the first layer of solid material (4) from the solid body (2), then providing a second receiving layer for holding another layer of solid material (5) on the solid body (2) reduced by the first layer of solid material (4), introducing or generating defects in the solid body (2) in order to determine a second detachment plane (9) along which a second layer of solid material (5) is separated from the solid body (2), applying heat to the second receiving layer in order to generate, in particular mechanically, stresses in the solid body (2), due to the stresses a crack propagating in the solid body (2) along the second detachment plane (9), which crack separates the second layer of solid material (5) from the solid body (2).

主权项

1. A method for producing layers of solid material, comprising at the very least the following steps:
providing a solid body (2) to be split into a number of layers of solid material (4), introducing or generating defects in the solid body (2) in order to determine a first detachment plane (8) along which a first layer of solid material (4) is separated from the solid body (2), providing a receiving layer (10) for holding the layer of solid material (4) on the solid body (2), applying heat to the receiving layer (10) in order to generate, in particular mechanically, stresses in the solid body (2), due to the stresses a crack propagating in the solid body (2) along the detachment plane (8), which crack separates the first layer of solid material (4) from the solid body (2), then providing a second receiving layer for holding another layer of solid material (5) on the solid body (2) reduced by the first layer of solid material (4), introducing or generating defects in the solid body (2) in order to determine a second detachment plane (9) along which a second layer of solid material (5) is separated from the solid body (2), applying heat to the second receiving layer in order to generate, in particular mechanically, stresses in the solid body (2), due to the stresses a crack propagating in the solid body (2) along the second detachment plane (9), which crack separates the second layer of solid material (5) from the solid body (2).