发明名称 Method for carburizing tantalum container
摘要 Provided is a method for carburizing a tantalum container which can easily control the carburization thicknesses of various portions of the tantalum container and carburize the tantalum container with a uniform thickness. A method for carburizing a tantalum container 1 made of tantalum or a tantalum alloy to allow carbon to penetrate the tantalum container 1 includes the steps of: supporting the tantalum container 1 on a support member 5, 6 provided in a chamber 3 and setting the tantalum container 1 in the chamber 3; and reducing the pressure inside the chamber 3 and heating the interior of the chamber 3, wherein a carbon source is placed in the vicinity of a portion of the tantalum container 1 hard to carburize.
申请公布号 US9435018(B2) 申请公布日期 2016.09.06
申请号 US201113990078 申请日期 2011.07.06
申请人 TOYO TANSO CO., LTD. 发明人 Watanabe Masanari;Abe Yoshihisa
分类号 C23C8/64 主分类号 C23C8/64
代理机构 Keating and Bennett, LLP 代理人 Keating and Bennett, LLP
主权项 1. A method for carburizing a tantalum container made of tantalum or a tantalum alloy to allow carbon to penetrate the tantalum container, the method comprising the steps of: supporting the tantalum container on a plurality of support rods provided in a chamber and setting the tantalum container in the chamber; and reducing the pressure inside the chamber and heating the interior of the chamber, wherein a carbon source is placed in the vicinity of a portion of the tantalum container hard to carburize, wherein the tantalum container is formed of a bottom part, a sidewall part, and an opening, and is set in the chamber to face the opening of the tantalum container downward by being supported on the plurality of supporting rods which are in direct contact with the bottom part of the tantalum container from the inside, and wherein the plurality of support rods are made of a carbon source.
地址 Osaka JP