发明名称 |
Acceleration sensor and method for producing an acceleration sensor |
摘要 |
The invention relates to an acceleration sensor, comprising a substrate having a substrate surface and a sample mass that is movable relative to the substrate in a first direction (x) parallel to the substrate surface. The sample mass has a comb-like electrode that is movable together with the sample mass and has a plurality of teeth, which extend in the first direction (x). The acceleration sensor further comprises a counter-electrode fixedly connected to the substrate, which counter-electrode has a fixed comb-like electrode and wherein said fixed comb-like electrode has a plurality of teeth which extend in a direction opposite to the first direction (x). The teeth of the movable comb-like electrode engage with the teeth of the fixed comb-like electrode. The acceleration sensor further comprises a shielding electrode fixedly connected to the substrate and which is suitable for increasing a pneumatic damping of the sample mass during a deflection movement of the sample mass. |
申请公布号 |
AU2014261760(B2) |
申请公布日期 |
2016.10.13 |
申请号 |
AU20140261760 |
申请日期 |
2014.03.27 |
申请人 |
Northrop Grumman LITEF GmbH |
发明人 |
Geiger, Wolfram;Bartholomeyczik, Julian;Leinfelder, Peter |
分类号 |
G01P15/08;B81B5/00;B81C1/00;G01P15/125 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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