发明名称 GATE VALVE
摘要 PROBLEM TO BE SOLVED: To provide a gate valve manufacturable at a low cost by reducing the number of constituent parts and with a simple mechanism and capable of preventing generation of particles. SOLUTION: The gate valve is equipped with a link mechanism 11 in a form of parallelogram consisting of a first link 11A fixed, a second 11B and a third link 11C, and a fourth link movable 11D coupled with the first link 11A through the second 11B and the third links 11C, a valve element 12 attached to the extensional end of the coupling part over the fourth like 11D for opening and closing an opening 21, and an air cylinder 13 which is to drive the valve element 12 and has two ends coupled with the coupling part of the first and second links and the coupling part of the third and fourth links.
申请公布号 JP2000337546(A) 申请公布日期 2000.12.05
申请号 JP19990149245 申请日期 1999.05.28
申请人 TOKYO ELECTRON LTD 发明人 OKA HIROKI;NARISHIMA MASAKI
分类号 F16K3/16;F16K31/122;F16K31/44;(IPC1-7):F16K31/44 主分类号 F16K3/16
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