发明名称 METHOD AND DEVICE FOR COATING HOLLOW BODIES
摘要 The invention relates to a method for coating hollow bodies (1) by means of layer deposition from a plasma, whereby a hollow body (1) in a vacuum chamber (2) is coated from outside with provision of electromagnetic radiation, injected through the interior of the hollow body. In the external volume, surrounding said hollow body (1), gases, vapours or mixtures thereof may be introduced into the vacuum chamber (2) which can be stimulated to give a plasma, whereby the process parameters are chosen such that in the internal volume (6) of the hollow body (1) the generation of a plasma is prevented.
申请公布号 WO0236850(A3) 申请公布日期 2002.07.18
申请号 WO2001EP12689 申请日期 2001.11.02
申请人 VEREINIGUNG ZUR FOERDERUNG DES INSTITUTS FUER KUNSTSTOFFVERARBEITUNG IN INDUSTRIE UND HANDWERK AN DER RHEINISCH-WESTFAELISCHEN RWTH AACHEN E.V.;DAHLMANN, RAINER 发明人 DAHLMANN, RAINER
分类号 C23C16/04;C23C16/511 主分类号 C23C16/04
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