Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever

摘要

The cantilever array comprises a large number of compliant cantilevers (3) sliding on the surface (2) of the specimen (1), sliding device of guide and rotation mechanism, a sensor, a homodyne laser interferometer, and a laser Doppler interferometer with specimen light excitation function.