| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a super junction structure.SOLUTION: A semiconductor device having a super junction structure composed of first conductivity type columns and second conductivity type columns comprises: a first region of the super junction structure in which a PN ratio increases with the increasing distance from a first surface side toward a second surface side of the super junction structure; and a second region of the super junction structure which contacts the first region and adjacent to a channel region of the semiconductor device. A PN ratio in the second region is lower than a PN ratio of the first region on and end on the second surface side and a thickness of the second region is thinner than a thickness of the first region.SELECTED DRAWING: Figure 1 |
