Intra-Die Defect Detection

摘要

Methods and systems for detecting defects on a specimen are provided. One system includes one or more computer subsystems configured for acquiring images generated by an imaging subsystem at multiple instances of a pattern of interest (POI) within a die formed on the specimen. The multiple instances include two or more instances that are located at aperiodic locations within the die. The computer subsystem(s) are also configured for generating a POI reference image from two or more of the images generated at the multiple instances of the POI within the die. The computer subsystem(s) are further configured for comparing the images generated at the multiple instances of the POI within the die to the POI reference image and detecting defects in the multiple instances of the POI based on results of the comparing.

主权项

1. A system configured to detect defects on a specimen, comprising:
an imaging subsystem comprising at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to a specimen, and wherein the detector is configured to detect energy from the specimen and to generate images responsive to the detected energy; and one or more computer subsystems configured for:
acquiring images generated by the imaging subsystem at multiple instances of a pattern of interest within a die formed on the specimen, wherein the multiple instances comprise two or more instances that are located at aperiodic locations within the die;generating a pattern of interest reference image from two or more of the images generated at the multiple instances of the pattern of interest within the die;comparing the images generated at the multiple instances of the pattern of interest within the die to the pattern of interest reference image; anddetecting defects in the multiple instances of the pattern of interest based on results of the comparing.