| 摘要 |
According to the invention, the efficiency and productivity of a vacuum deposition system for the application of a layer on a substrate, in particular, for the deposition of glass, glass-ceramic, and/or ceramic layers from the vapour phase on a substrate, may be improved, whereby a substrate holder device with moving segments is provided, which can adopt a first position for the insertion or removal of substrates and a second position for deposition. The invention further relates to an exchange device for the exchange of vaporising materials within a vacuum deposition chamber and vaporising material units suitable for the above. Furthermore, a vacuum deposition unit with said devices and a corresponding method for coating substrates are disclosed. |
