| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe assembly for preventing an arm from being excessively warped and deformed when it is removed from an electrode even if the electrode is melted and attached to probes. SOLUTION: The probe assembly is provided with: a probe substrate; an attachment section supported by the probe substrate; the arm spaced from the probe substrate and extended from an attachment section along the probe substrate; a plurality of the probes disposed in the arm, and respectively having needles separated and protruded from the probe substrate; and a means supported by the probe substrate, and regulating a warpage and a deformation generated in the arm when an action force is applied to the needles of the probes in the direction for separating them from the probe substrate. COPYRIGHT: (C)2008,JPO&INPIT
|
