| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a surface. SOLUTION: This method for inspecting a characteristic of the surface includes a step for emitting a radiation onto the surface 9 to be inspected, at the first prescribed emission angleα<SB>1</SB>, a step for receiving at least one portion of the radiation emitted from the first emission angleα<SB>1</SB>, and reflected from the surface 9 to be inspected, at the first reception angleβ<SB>1</SB>, and for outputting a plurality of first measured values that are features of the received radiation, a step for emitting a radiation onto the surface 9 to be inspected, at the second prescribed emission angleα<SB>2</SB>, a step for receiving at least one portion of the radiation emitted from the second emission angleα<SB>2</SB>, and reflected from the surface 9 to be inspected, at the second reception angleβ<SB>2</SB>, and for outputting a plurality of second measured values that are features of the received radiation, and a step for comparing the first measured values with the second measured values. COPYRIGHT: (C)2008,JPO&INPIT
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