发明名称 RAMAN AND PHOTOLUMINESCENCE SPECTROSCOPY
摘要 PROBLEM TO BE SOLVED: To provide an efficient spectroscopic system of high quality. SOLUTION: The spectroscopic system 100 is provided with an aperture installed to receive light containing a plurality of wavelength components including a photoluminescence wavelength component and a Raman shift component, from a sample 102, a separation element 122 installed on an optical path of the light, and constituted to separate spatially the components of the light, the first array detector 131 installed to receive the Raman shift component, and to generate one or a plurality of signals indicating an intensity of the Raman shift component, and the second array detector 132 installed to receive the photoluminescence wavelength component, and to generate one or a plurality of signals indicating an intensity of the photoluminescence wavelength component. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008096432(A) 申请公布日期 2008.04.24
申请号 JP20070246562 申请日期 2007.09.25
申请人 WAFERMASTERS INC 发明人 YOO WOO SIK
分类号 G01J3/44;G01J3/14;G01J3/36;G01J3/443;G01N21/64;G01N21/65 主分类号 G01J3/44
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