| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-bandwith atomic force microscopic apparatus (AFM). SOLUTION: A surface shape observer (STO) that id a disturbance observer for estimating the surface shape measured by AFM is realized as an open loop, that is independent of a feedback loop in a closed-loop system; and since the band of AFM will not affect the stability of the closed-loop system, AFM which is widened farther in band than the feedback control system can be provided. COPYRIGHT: (C)2008,JPO&INPIT
|
