| 摘要 |
PROBLEM TO BE SOLVED: To acquire a stable amount of received light, according to work pieces in an optical displacement meter in which light receiving elements are arranged two-dimensionally. SOLUTION: An optical displacement meter is provided with the two-dimensional light-receiving elements for receiving reflected light of band-like light from an object to be measured; a light-reception level control means 61 for feedback-controlling at least any parameter among manipulated variables, including the amount of emitted light of a light-projecting part 3 and an amplification factor for an amplifier, in such a way that the distribution of the peak levels of the waveform of light-receiving signals in a first direction of amplification signals acquired at the amplifier lie within a prescribed range; and a mode change-over means 53 for changing over between a measuring mode for measuring displacements of the object to be measured and a setting mode for setting manipulated variables of the light-reception-level control means 61. In the setting mode, the light-projecting part 3 previously irradiates band-like light to the object to be measured, to measure the distribution state of peaks of amplification signals at each location in the first direction, and the light-reception-level control means 61 adjusts manipulated variables, according to the distribution state in the first direction. COPYRIGHT: (C)2008,JPO&INPIT
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