| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor reduced in current consumption and capable of detecting the concentration of a gas, with high sensitivity. SOLUTION: The gas sensor is equipped with a quartz vibration piece 10 provided with vibration arms 11, subjected to bending vibration end the base part 12 connected to the vibration arms 11, the exciting electrodes 13 and 14 formed to the quartz vibration piece 10, the hydrogen reacting catalyst film 16 formed to the quartz vibration piece 10 and made to react with the gas to generate heat and an oscillation circuit for exciting the quartz vibration piece 10. The change in the temperature of the quartz vibration piece 10, due to the generation of heat of the hydrogen reacting catalyst film 16 is detected as a frequency signal. COPYRIGHT: (C)2008,JPO&INPIT
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