| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method capable of improving measurement accuracy by reducing the effects of multiple reflection. SOLUTION: The shape measuring method comprises steps (S101-S103) for setting the reduction or quenching of part of a projection pattern multiply reflected at a surface of an object to be inspected and imaged and steps (S104-S105) for projecting the projection pattern reduced or quenched by the pattern projection part in the last steps to the object to be inspected, imaging, at an imaging part, the object to be inspected to which the projection pattern is projected, and measuring the three-dimensional shape of the object to be inspected on the basis of images of the object to be inspected to which the projection pattern reduced or quenched in the last steps is projected. COPYRIGHT: (C)2009,JPO&INPIT
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