UNIFORM LAYERS FORMED WITH ASPECT RATIO TRENCH BASED PROCESSES
摘要
An embodiment includes a device comprising: first and second fins adjacent one another and each including channel and subfin layers, the channel layers having bottom surfaces directly contacting upper surfaces of the subfin layers; wherein (a) the bottom surfaces are generally coplanar with one another and are generally flat; (b) the upper surfaces are generally coplanar with one another and are generally flat; and (c) the channel layers include an upper III-V material and the subfin layers include a lower III-V material different from the upper III-V material. Other embodiments are described herein.
申请公布号
WO2016105384(A1)
申请公布日期
2016.06.30
申请号
WO2014US72143
申请日期
2014.12.23
申请人
INTEL CORPORATION
发明人
GARDNER, SANAZ K.;RACHMADY, WILLY;METZ, MATTHEW V.;DEWEY, GILBERT;KAVALIEROS, JACK T.;MOHAPATRA, CHANDRA S.;MURTHY, ANAND S.;RAHHAL-ORABI, NADIA;ZELICK, NANCY M.;FRENCH, MARC C.;GHANI, TAHIR